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Argon cluster impacts on layered silicon, silica, and graphite surfaces

Journal article
Authors J. Samela
K. Nordlund
J. Keinonen
Vladimir Popok
Eleanor E B Campbell
Published in European Physical Journal D
Volume 43
Pages 181-184
Publication year 2007
Published at Department of Physics (GU)
Pages 181-184
Language en
Keywords Clusters, Theory of impact phenomena, numerical simulations
Subject categories Low energy physics, Condensed Matter Physics


Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

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